062
LowerLimit:C *ENG [0 to 400 / 200 / 1V/step]
Sets Development Potential (Lower Limit) (C).
063
LowerLimit:M *ENG [0 to 400 / 200 / 1V/step]
Sets Development Potential (Lower Limit) (M).
064
LowerLimit:Y *ENG [0 to 400 / 200 / 1V/step]
Sets Development Potential (Lower Limit) (Y).
101
Current:K *ENG [0 to 800 / 0 / 1V/step]
Displays Development Potential: Current Value (K) according to paper.
102
Current:C *ENG [0 to 800 / 0 / 1V/step]
Displays Development Potential: Current Value (C) according to paper.
103
Current:M *ENG [0 to 800 / 0 / 1V/step]
Displays Development Potential: Current Value (M) according to paper.
104
Current:Y *ENG [0 to 800 / 0 / 1V/step]
Displays Development Potential: Current Value (Y) according to paper.
3623
[LD Power :Set]
Displays LD power decided Procon.
051
Line Width Adj.:K *ENG [20 to 120 / 53 / 1um/step]
Sets Line Width Adj. (K) [Operator Adjustment Item].
052
Line Width Adj.:C *ENG [20 to 120 / 51 / 1um/step]
Sets Line Width Adj. (C) [Operator Adjustment Item].
053
Line Width Adj.:M *ENG [20 to 120 / 51 / 1um/step]
Sets Line Width Adj. (M) [Operator Adjustment Item].
054
Line Width Adj.:Y *ENG [20 to 120 / 51 / 1um/step]
Sets Line Width Adj. (Y) [Operator Adjustment Item].
SP3-XXX (Process)
47