37
Magnetically Levitated Turbo Molecular Pump
INSTRUCTION MANUAL
7
OPTION
A gas purge adaptor with an orifice is available as an option. The gas purge adaptor with an
orifice maintains the purge gas flow between 20 and 30 mL/min if the gas-supply pressure lies
within the range below. Flow control with a flowmeter is not required.
Note: Gas purge adaptors with no orifice
are recommended for applications in which large
amounts of reaction products are generated (e.g., metal etchers). Adaptors with an orifice
willcause clogging.
Fig. 7-3 Gas Purge Method (diameter of orifice is φ0.05mm)
Table. 7-2 Table of Gas-purge Ports (diameter of orifice is φ0.05mm)
Gas supply
20
± 10 kPa gauge pressure (nitrogen gas)
Gas feed start After starting backing vacuum pump; before evacuating process gas
Gas feed stop After fully exhausting process gas; before stopping backing vacuum pump
Type of gas Nitrogen gas or argon gas (Purity > 99.99%)
Joint PART No. Description
KF10 262-77592-03 GP ADAPTOR, 802 KF10
UJR 6.35 262-77592-01 GP ADAPTOR, 802 UJR
SWAGELOK
φ6.35
262-77592-06 GPA, SS-400 STRAIGHT
4-VCR 262-77592-14 GP ADAPTOR, 4-VCR
PURGE PORT
FLOW ALARM
VACUUM CHAMBER
TURBO MOLECULAR
PUMP
BACKING VACUUM PUMP
FILTER
VALVE
REGULATOR
GAS
SOURCE
FLOWMETER WITH
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