Page 0 10997-D02
MAX300 Series 3-Axis Flexure Stages
Contents
Chaper 1 Overview ..................................................................................................... 1
1.1 Description of the NanoMax 3-Axis Flexure Stage ......................... 1
1.2 Component Identification .................................................................. 1
1.2.1 NanoMax Stage ......................................................................................1
1.2.2 Drives and Actuators ...............................................................................3
Chaper 2 Safety .......................................................................................................... 5
2.1 Safety Information ............................................................................. 5
2.2 General Warnings .............................................................................. 5
Chaper 3 Operation .................................................................................................... 6
3.1 Manual Differential Drives and Differential Micrometer Drives ..... 6
3.1.1 Adjusting Micrometer Drives ................................................................... 6
3.1.2 Reading Micrometer Drives ....................................................................6
3.2 Stepper Motor Drives ......................................................................... 6
3.3 Piezo Actuators ................................................................................ 11
Chaper 4 Installation ................................................................................................ 12
4.1 Unpacking ........................................................................................ 12
4.2 Attaching to a Work Surface ........................................................... 12
4.3 Fitting and Removal of Drives ........................................................ 13
4.4 Orienting the Moving Platform ....................................................... 14
4.5 Mounting Equipment. ...................................................................... 15
4.6 Transportation. ................................................................................ 15
4.7 Dimensions ....................................................................................... 16
4.7.1 Top Platform ......................................................................................... 16
4.8 Replacing the Top Platform ............................................................ 17
Chaper 5 Maintenance and Troubleshooting ......................................................... 18
5.1 Maintenance of Motor Drives .......................................................... 18
5.2 Troubleshooting ............................................................................... 18
Chaper 6 Specifications ........................................................................................... 19
6.1 Specifications ................................................................................... 19
Chaper 7 Regulatory ................................................................................................ 21
7.1 Declarations Of Conformity ............................................................ 21
7.1.1 For Customers in Europe ...................................................................... 21
7.1.2 For Customers In The USA ................................................................... 21
7.2 CE Certificate ................................................................................... 22
Chaper 8 Thorlabs Worldwide Contacts ................................................................ 23
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