Page 20 10997-D02
MAX300 Series 3-Axis Flexure Stages
Arcuate Displacement
The measured maximum cross talk to the Z axis, when a movement is demanded in
X or Y is <88 µm. The table below shows the theoretical amount of cross talk to the Z
axis, for movement at various X positions (Y axis at zero).
Cross talk at Y axis positions (with X at zero) would be the same.
The measured maximum cross talk to the X and Y axes, when a movement is
demanded in Z is <66 µm. The table below shows the theoretical amount of cross talk
to the X axis, for movement at various Z axis positions (Y axis at zero).
Cross talk to Y axis positions (with X axis at zero) would be the same..
X axis po sition (mm): 0.0 0 .5 1.0 1.5 2.0 2.5 3.0 3.5 4.0
Arcuate Motion in Z axis (µm) 88.0 45.0 20.0 5.0 0.0 5.0 20.0 45.0 88.0
Z axis position (mm): 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0
Arcuate Motion in X axis (µm) 57.1 32.1 14.3 3.6 0.0 3.6 14.3 32.1 57.1
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