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VSM-de-171005
2.3 Product Description
The VSM vacuum transducer is measuring total gas pressure in the range of
1000 - 5x10
-9
mbar. The transducer can be connected to Thyracont display and
control units or to customer related power supply and evaluation units in
compliance with pin assignment. The analog output signal 1.82V - 8.6V has a
logarithmic dependence on pressure over the whole range.
In addition the device has a serial RS485 interface for digital data transfer (see
chapter 5.1).
The transducer is equipped with a metal-sealed combination sensor type Pirani /
Cold Cathode (inverted magnetron) and temperature compensated. It can be
mounted to suitable flange connectors.
Proper Use
The VSM serves exclusively to provide absolute pressure measurements in
gaseous media in the range 1000 - 5x10
-9
mbar. It may only be connected to
components specifically provided for such purpose.
Improper Use
The use for purposes not covered above is regarded as improper, in particular:
- the connection to components not allowed for in their operating instructions
- the connection to components containing touchable, voltage carrying parts.
No liability or warranty will be accepted for claims arising from improper use.
The user bears the responsibility with respect to the used process media.
The device is not designed for use in corrosive gas atmos-
phere. Aggressive media such as halogenides, carbon or oxy-
gen plasma can reduce sensor life-time!
Dust, oil or condensing vapours will affect sensor performance
and may cause malfunction!
Permanent operation in the pressure range 5x10
-4
to 5x10
-3
mbar may cause increased wear of the cold cathode sensor!
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