Thyracont VSM77D - 7 Technical Data

52
VSM-de-171005
VSM77 ∅40
VSM78 ∅52
VSM79 ∅70
1
3
9
139
40
69
48
70
153
7 Technical Data
Measurement Principle Heat conduction Pirani / Cold Cathode (inverted magnetron)
depending on gas type
Measurement Range
1000 - 5x10
-
9
mbar (750 - 5x10
-
9
Torr)
Max. Overload 10 bar abs.
Accuracy 1000 - 10 mbar: approx. 30 % f. reading
10 - 2x10
-3
mbar: 10 % f. reading
2x10
-3
- 1x10
-8
mbar: 25 % f. reading
Repeatability
10 - 1x10
-
2
mbar: approx. 2% f. reading
1x10
-2
-1x10
-8
mbar: approx. 7% f. reading
Materials with vacuum
contact
stainl. steel 1.4307, tungsten, nickel, glass,
molybdenium, Al
2
O
3
ceramic
Anode Material molybdenium