Thyracont VSM77D - Bake-Out

39
VSM-de-171005
Set
Set
Status LED orange
Initializing
Adjustment
Status LED green
Normal Operation
Status LED
orange
Adjustment
3s
Set
Automatic
Adjustment of
zero or atmosphere
pressure Pirani
Status LED green
Normal Operation
10s orange
Status LED green
Normal Operation
1s green
Status LED red
Adjustment
Error
Status LED green
Normal Operation
3s
Status LED
flashing quickly
flashing slowly
continuously on
Status LED green
Normal Operation / Magnetron off
Status LED
Normal Operation / Magnetron on
green
4.4 Bake-Out
When a bake-out of the vacuum chamber is performed with the VSM being
mounted to the chamber, the temperature at the sensor flange must not exceed
160 °C.
The transducer's voltage supply must be switched-off while the
chamber is heated. Otherwise a damage of the electronics can
be the result!