40
Readjustment via Software Command
See section 5.7.
4.4 Bake-Out
When a bake-out of the vacuum chamber is performed with the VSP/VCP being
mounted to the chamber, the temperature at the sensor flange must not exceed
150
◦
C.
The transducer’s voltage supply must be switched-off while the
chamber is heated. Otherwise a damage of the electronics can be
the result!
VSP/VCP-RS485-200116
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