ULS VLS Series - Page 66

VLS Service Manual - REV2015.04
Table of Contents
Z-Axis
Page | 66
Z-Axis
6. Looking underneath the stage locate and remove the two screws and washers holding the right-hand
side of the stage to the right table support. Set the screws aside.
7. Lift the stage out of the system and set it in a safe location being careful not to damage the proximity
sensor.
8. Installation is opposite of removal.