OPERATING PROCEDURE
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3. OPERATING PROCEDURE
3.1. Handling
• Start measurement more than one minute after power is turned ON and the indication is stabilized.
• For precision measurement, wait for at least 10 minutes until temperature equilibrium of the sensor
head is established after power is turned ON. Do not turn OFF the power when a sequence of
measurements is being made.
• If the sensor head is exposed to a chemically active gas or highly adsorptive gas, its characteristics
may change.
In such a case, fill the chamber with nitrogen, inert gas or dry air with the sensor head energized
with power, and then evacuate it. Repeat this purging operation. The sensor head may be
restored to the condition before the characteristics changed. At this time, do not blow gas toward
the opening plane of the sensor head even if the gas is inert or dry air.
If there is no prospect of the characteristics being restored by purging operation, replace the sensor
head.
• The Pirani vacuum gauge is sensitive to all types of gas, but its sensitivity varies with the type of
gas. This gauge indicates pressure by assuming that the gas is nitrogen (N
2
).
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