Ulvac GP-1G - Table of Contents

Contents
Contents
Page
Prior to Use ........................................................................................................................................... i
Safety Denotations ................................................................................................................................ i
Safety Cautions .................................................................................................................................... ii
Revision History ..................................................................................................................................
ⅳ
1. OVERVIEW .................................................................................................................................1
1.1. SPECIFICATIONS ......................................................................................................................1
1.2. STANDARD ACCESSORIES ........................................................................................................1
1.3. OPTIONS .................................................................................................................................1
1.3.1. Sensor head ....................................................................................................................2
1.3.2. Measuring unit................................................................................................................2
1.3.3. Sensor head cable ...........................................................................................................2
1.3.4. Others.............................................................................................................................2
1.4.
DESCRIPTION OF COMPONENTS ................................................................................................3
1.4.1. GP-1G ............................................................................................................................3
1.4.2. GP-1G with case .............................................................................................................5
2. INSTALLING THE PIRANI GAUGE .........................................................................................7
2.1. PRELIMINARY OPERATION .......................................................................................................7
2.2. INSTALLATION.........................................................................................................................7
2.2.1. Installing the controller ...................................................................................................7
2.2.2. Installing the sensor head................................................................................................8
2.2.3. Electrical connection ......................................................................................................8
2.2.4. A sensor head installation method to GP-H ................................................................... 10
3. OPERATING PROCEDURE ..................................................................................................... 11
3.1. HANDLING ............................................................................................................................ 11
3.2. RECORDER OUTPUT ............................................................................................................... 12
4. TROUBLESHOOTING.............................................................................................................. 14
5. APPENDIX ................................................................................................................................. 16
5.1. PRINCIPLES OF OPERATION .................................................................................................... 16
5.2. TYPES OF GAS MEASURED AND INDICATION ........................................................................... 17
5.3. ACCURACY OF PIRANI VACUUM GAUGE ................................................................................. 19
6. WARRANTY .............................................................................................................................. 22
7. RELATED DRAWINGS ............................................................................................................ 25