Ulvac GP-1G - Page 27

APPENDIX
- 20 -
The "Error Range of Pirani Vacuum Gauge" table is given for reference.
Indicated
Values (Pa)
Working Standard
(Pa)
Indicated Values
(Pa)
Working Standard
(Pa)
0.4
0
-
3
100
83
-
120
2
0
-
5
200
170
-
230
5
2
-
8
400
345
-
465
10
7
-
14
600
510
-
715
20
14
-
26
1000
825
-
1250
40
32
-
49
2000
1650
-
2900
60
49
-
71
2700
1920
-
3750
Indicated
Values (Torr)
Working Standard
(Torr)
Indicated
Values (Torr)
Working Standard
(Torr)
0.003
0
-
0.02
1
0.85
-
1.2
0.01
0
-
0.03
2
1.7
-
2.3
0.05
0.03
-
0.08
3
2.6
-
3.5
0.1
0.07
-
0.13
4
3.4
-
4.6
0.2
0.14
-
0.26
6
5.0
-
7.2
0.4
0.33
-
0.48
10
8.0
-
13
0.8
0.68
-
0.92
20
15
-
27
1 10 100 1000
1
10
100
1000
Indicated Values (Pa)
+3%
-3%
0.4
Working Standard (Pa)