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Ulvac HPS-1600F - Page 44

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ELECTRON-BEAM POWER SUPPLY HPS-1600F
4. Description of Each Part
35
1 EMISSION knob
This is for setting beam current. The range is 0 to 100.
Or the range is 0 to 100 / 0 to 1,600 mA (MAX POWER without adjustment).
2 X-AXIS POSITION knob
This is for setting the direct current passing through the X-axis of the XY sweep coil.
The beam position can be moved in the X-axis direction by changing the current.
The variable range is the value from X CURRENT MAX to X CURRENT MIN set in the XY
SCAN menu of DISPLAY.
3 X-AXIS SWEEP knob
This is for adding a triangular wave in the form superposed on the direct current passing
through the X-axis of the XY sweep coil.
This enables a beam scan in the X-axis direction.
The variable range is the X CURRENT MAX value set in the XY SCAN menu of DISPLAY.
4 Y-AXIS POSITION knob
This is for setting the direct current passing through the Y-axis of the XY sweep coil.
The beam position can be moved in the Y-axis direction by changing the current.
The variable range is the Y CURRENT MAX value set in the XY SCAN menu of DISPLAY.
5 Y-AXIS SWEEP knob
This is for adding a triangular wave in the form superposed on the direct current passing
through the Y-axis of the XY sweep coil.
This enables a beam scan in the Y-axis direction.
The variable range is the Y CURRENT MAX value set in the XY SCAN menu of DISPLAY.
In the state that LOCAL CONTROL BOX removed or when the connector of LOCAL CONTROL
BOX is removed during the operation, it is dangerous because each output becomes its
minimum value.
In addition, if the high voltage is switched to ON with the EMISSION knob not set to 0, a beam
current suddenly passes. Before switching the high voltage to ON, make sure first that the
EMISSION knob is set to 0.
If in XY SCAN MENU of DISPLAY of the Gun controller, the CONTROL mode is set to
REMOTE, the control is moved to the outside and therefore operation can be done by LOCAL
CONTROL BOX.
CAUTION
REFERENCE