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Ulvac HPS-1600F - Table of Contents

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ELECTRON-BEAM POWER SUPPLY HPS-1600F
Table of Contents
viii
Table of Contents
1. For Your Safety Use ................................................................................................. 1
1.1 Caution on handling ................................................................................................................................................... 1
1.2 When you make an inquiry ..................................................................................................................................... 1
2. Overview ................................................................................................................... 2
2.1. Introduction ..................................................................................................................................................................... 2
2.2. Feature ............................................................................................................................................................................. 2
2.3. Equipment configuration .......................................................................................................................................... 3
2.4. Specifications ................................................................................................................................................................ 6
2.5. External I/O signal....................................................................................................................................................... 7
2.6. External dimensions and mass ............................................................................................................................ 8
3. Preparation ............................................................................................................... 9
3.1. Precautions in unpacking ........................................................................................................................................ 9
3.1.1. Check after unpacking ....................................................................................................... 9
3.2. Installation site and installation .......................................................................................................................... 10
3.3. Things to be prepared ............................................................................................................................................. 10
3.3.1. Power receiving equipment.............................................................................................. 11
3.3.2. Cable connection ............................................................................................................. 12
4. Description of Each Part ....................................................................................... 17
4.1. Front panel of power supply main unit ........................................................................................................... 17
4.2. Back panel of power supply main unit ............................................................................................................ 19
4.3. Alarm fuse ..................................................................................................................................................................... 23
4.4. Gun controller front panel ..................................................................................................................................... 25
4.5. Gun controller back panel ..................................................................................................................................... 26
4.6. Local control box ....................................................................................................................................................... 34
5. Operation ................................................................................................................ 36
5.1. Pre-operation check ................................................................................................................................................. 36
5.2. LOCAL operation ....................................................................................................................................................... 39
5.3. PROGRAM operation.............................................................................................................................................. 46
5.4. Power supply error state ........................................................................................................................................ 48
6. Maintenance ........................................................................................................... 50
6.1. Maintenance/Inspection of this product ......................................................................................................... 51
6.2. Periodical inspection ................................................................................................................................................ 53
6.3. About recommended replacement parts ....................................................................................................... 55
7. Troubleshooting .................................................................................................... 56
7.1. Troubleshooting .......................................................................................................................................................... 56
8. Attached Data ......................................................................................................... 64

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