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Ulvac ULK-04A - Explosion

Ulvac ULK-04A
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SK00-4802-DI-002-04
No.16.10.20
4
1.1.7 Explosion
Factor How to avoid / Measure
The pump's internal pressure
increases and the pump bursts.
This pump is not designed for pressurization and, if
pressurized, may burst, scattering broken pieces.
Do not pressurize not only during the operation but
also under any circumstances.
Factor How to avoid / Measure
Explosion hazard
Do not operate if there is no vacuum pump oil
poured or its level is extremely low such that you
cannot see the oil through the inspection window.
Otherwise the oil is decomposed, causing a higher
risk of explosion.
Be sure to check through the inspection window
that the oil level is appropriate before operation and
periodically.
WARNING

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