Ulvac ULK-04A - Attachment of Pump in the Line; Removal of Heater

SK00-4802-DI-002-04
No.16.10.20
39
6.2.7 Attachment of pump in the line
(1) Pour the specified amount of oil from the air inlet or outlet.
(2) Attach the air inlet flange and the air outlet flange in the line.
(3) Attach the thin flex tubes for cooling water.
(4) Connect the electric wires to the terminal box. (See Fig. 4.)
6.2.8 Removal of heater
The heater replacement should follow the heater replacement
instructions.
It is basically recommended to request a service center to replace the
heater.
(1) The pump is stopped.
(2) The temperatures or the pump and the heater is close to the
ambient temperature.
(3) The primary power cable is disconnected.
Check these and then replace the heater.
The heater replacement should follow the heater replacement
instructions.
It is basically recommended to request a service center to replace the
heater.
CAUTION
CAUTION
CAUTION