Ulvac ULK-04A - Performance Specifications

SK00-4802-DI-002-04
No.16.10.20
7
2.2 Performance specifications
Table 1 Performance specifications
Model
Specification
ULK-04A ULK-06A
Oil
ULVOIL
D-11
ULVOIL
D-31
ULVOIL
D-11
ULVOIL
D-31
Pump Power*1 kW 0.55 0.73 0.90 1.2
Ultimate pressure Pa
＜2.6×10
-5
＜2.6×10
-6
＜2.6×10
-5
＜2.6×10
-6
Maximum forepressure Pa 40 60 40 60
Evacuation speed L/s 550 500 1200 1100
Maximum air outlet
volume
Pa・
m
3
/s
0.086 0.13 0.15 0.20
Heating up time min 9 8.5 16.5 15
Oil capacity L 0.15 0.15 0.35 0.35
Water capacity L/min 1.0 1.0 1.0 1.5
Standard backing pump VD151,VD201,PVD-180,PVD360 VD30C,VD40C,VD60C
Model
Specification
ULK-10A ULK-14A
Oil
ULVOIL
D-11
ULVOIL
D-31
ULVOIL
D-11
ULVOIL
D-31
Pump Power*1 kW 2.0 2.4 2.25 2.4
Ultimate pressure Pa
＜2.6×10
-5
＜2.6×10
-6
＜2.6×10
-5
＜2.6×10
-6
Maximum forepressure
Pa 35 40 30 30
Evacuation speed L/s 3400 3000 5400 4900
Maximum air outlet
volume
Pa・
m
3
/s
0.35 0.43 0.35 0.47
Heating up time
min 20 20 25 25
Oil capacity
L 0.8 0.8 1.5 1.5
Water capacity
L/min 2.5 3.0 2.5 3.5
Standard backing pump PKS-030,PKS-016,VD90C,VS1501 PKS-030,VS1501,VS2401
*1: The power requires 1φ-200V or 1φ-220V. Pay attention to a heater applicable to the voltage you
specified when purchasing is attached.
*2 Cooling water temperature: 19 to 25℃; Cooling water pressure: 0.1 to 0.3MPaG (gauge)