Ulvac ULK-04A - Main Replacement Parts

SK00-4802-DI-002-04
No.16.10.20
50
9 Main Replacement Parts
Table 4: List of main replacement parts
Material Shape/Dimensions Remarks
Air inlet gasket
ULK-04A
Nitrile rubber or
fluorine-contained
rubber
4×4×I.D120
ULK-06A
4×4×I.D175
ULK-10A
8×8×I.D275
ULK-14A
8×8×I.D380
Air outlet gasket
ULK-04A
Nitrile rubber or
fluorine-contained
rubber
W4×I.D39.5
V40
ULK-06A
W4×I.D54.5
V55
ULK-10A,ULK-14A
W4×I.D99
V100
Oil
ULVOIL D-11
Hydrocarbon-based
Oil
ULVOIL D-31
Silicone-based
Heater
The wattage of
the heater
depends on the
oil type.
Thermo cement
Thermostat Option
* The standard gasket material is nitrile rubber; fluorine-contained rubber is an option.