Ulvac ULK-04A - Page 54

SK00-4802-DI-002-04
No.16.10.20
37
No. Name
1 Hot cap
2 Plain washer: For M5
3 Hexagon nut: M5
4 Fixing ring
5 Distance pipe
6 Screw: M5
7 Thermal radiation plate
8 1st steam cylinder
Figure 13: Exploded diagram of 1st steam cylinder for ULK-10A, ULK-14A