SK00-4802-DI-002-04
No.16.10.20
45
Problem Cause Measure Ref.
Pressure does
not decrease.
Pressure varies
(11) The pipe diameter in the
section to the ancillary
pump.
(11) Use pipes with a sufficient
conductance.
3.4~
3.5
(12) The valves on the high
vacuum and ancillary
pump sides are closed.
(12) Open the valves. 3.4~
3.5
(13) The exhaust capacity of
the ancillary pump is low.
(13) Review of exhaust system 2.2
(14) A condensable gas, such
as vapor and solvents,
has been sucked.
(14) Replace oil.
Overhaul
3.2
6.2.1~
6.2.7
(15) Is it left for 15 or more
minutes after the power to
the heater is turned on?
(15) Wait until the pump becomes
hot.
(16) The heater cement has
deteriorated.
(16) Replace the heater cement.
6.2.8~
6.2.9
(17) The pressure
measurement method is
wrong.
(17) Measure the pressure
properly.
(18) The exhaust performance
of the ancillary pump is
decreased.
(18) Measurement of the ultimate
pressure etc. of the ancillary
pump
Overhaul of ancillary pump
(19) The vacuum gauge is not
appropriate.
(19) Make measurements in the
proper pressure zone using a
properly calibrated vacuum
gauge.
(20) The pipes connected to
the air inlet are thin or the
distance is long.
(20) Make connections with pipes
of the diameter similar to the
air inlet to shorten the
distance to the vacuum
chamber.
3.4~
3.5
(21) Oil, grease, or dirt
adheres to the inside of
the pipes on the high
vacuum side, flanges, etc.
(21) Cleaning of pipes etc.
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