Ulvac VD151 - Page 18

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YK08-0028-DI-002-08

Contents-3

Tables and Illustrations

Table. 1 Performance specifications .......................................................................................................... 5

Table. 2 Electric capacity of the motor overload protector ....................................................................... 13

Table. 3 Specification of the temperature sensor (PTO) .......................................................................... 16

Table. 4 Recommended replacement cycle of the vacuum pump oil ...................................................... 30

Table. 5 Trouble check list ........................................................................................................................ 36

Table. 6 Main displacement parts list (VD151)......................................................................................... 45

Table. 7 Main displacement parts list (VD201)......................................................................................... 46

Fig. 1 Warning Label .................................................................................................................................. xi

Fig. 2 VD151 Dimensional drawing ............................................................................................................ 6

Fig. 3 VD201 Dimensional drawing ............................................................................................................ 7

Fig. 4 Lubrication and oil level indication ................................................................................................... 9

Fig. 5 Connection to vacuum chamber (example) ................................................................................... 10

Fig. 6 Terminal box internal wiring diagram ............................................................................................. 14

Fig. 7 Electrical wiring diagram ................................................................................................................ 14

Fig. 8 To use Oil mist trap “Model TMX-1” for “VD151 or VD201” ........................................................... 25

Fig. 9 When having mounted oil mist trap and adapter ........................................................................... 25

Fig. 10 Show the relationship between the suction pressure and pumping speed - MODEL

VD151/VD201 ........................................................................................................................................... 27