Ulvac VD151 - Trouble Check List

YK08-0028-DI-002-08
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6.5 Trouble check list
Table. 5 Trouble check list
Trouble Causes Processing method Reference
The Pump
does not run.
1) Motor connection is
wrong.
2) Safety circuit such as
the Electromagnetic
breaker is not correctly
set.
3) Oil viscosity got higher.
4) Foreign substance
entered in the Pump
caused burning
the Rotor or the like.
5) Reactive agent
accumulated inside
the Pump while
the Pump was stopped
after having exhausted
the reactive gas.
6)The pump is not
connected to
the power supply.
7)The power switch is
not turned on.
8)Problem with power
supply voltage
9)The overload protector
has actuated.
1) Check the connection.
2) Make the Safety circuit
conform to the Motor
specification.
3) Replace the oil.
4) Conduct the overhaul
(replacement of the
Cylinder,
Rotor, Cover and so on.)
5) Conduct the overhaul
(cleaning inside the Pump,
removal of reactive agent
and so on.)
6)Connect the pump to
the power supply.
7)Turn on the power switch.
8)Set the power supply voltage
to within ±10% of the rated
voltage.
9)Press the reset button.
3.5
0.6
3.5
3.2
6.2.2
6.4
6.4
3.5
3.5
3.5
3.5