Ulvac VD151 - Page 58

YK08-0028-DI-002-08
40
Trouble Causes Processing method Reference
Pump surface
temperature is
abnormally high.
(50℃ or more
higher than
the room
temperature)
1) Keeping continuous
operation under high
suction pressure.
2) The oil is not supplied
by
the specified volume.
(Less oil volume would
lower the cooling effect
of
the Pump.)
3) Suction gas is hot.
4) The oil is not circulating.
a) Oil pit of the Cover or
the like is clogged.
b) Oil disturb
5) The pump perimeter is
hermetically being
sealed.
6) A high temperature
1) Pump surface temperature
would rise up around 100℃
on continuous operation
under
high suction pressure.
No problem.
2) Control the oil level.Supply
the oil by the specified
volume.
3) Install a cooling device such
as the Gas cooler on
the suction side.
4) Overhaul
a) Clean the oil pit.
b) Check and repair the Oil
distributor valve.
5) Make the ventilation
available.
6) Please use it in environment
with the air conditioning
3.2
6.4
0.5.3
Lot of oil mist
blowing out of
the Exhaust
outlet.
1) Pump is filled over
the specified volume.
2) Keeping continuous
operation under
highsuction pressure
3) Oil mist trap is clogged.
1) Drain the oil until it gets
the specified volume.
2) Put the Oil mist trap on
the Exhaust side.
3) Replace the Oil mist trap.
3.2
6.2.2
4.6
4.6
6.2.8