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Chapter 4: Installation
Inspection
Unpack the Mark series fluid cooled ion source and inspect it carefully
for any visible damage. If damage is found, notify the shipping company
and contact “Service Support” on page 62 immediately. Check that all
accessories and options have been included with the source package.
The Mark anode assembly is shipped separately from the source
body. The anode assembly must be mounted in the base assembly
before operating the source in the process chamber. Refer to ”FIG-
URE 6.16” on page 44 and Step ”6.” on page 44 for detailed instruc-
tions.
General
Install and furnish utilities to the ion source. Where appropriate, refer to
“Drawings” on page 73 and “Specifications” on page 63.
It is the customer/installer’s responsibility to install this equipment
in accordance with current local electrical and mechanical code
requirements, in addition to any applicable national regulations.
This chapter is divided into the following sections:
• Verify Facilities
• Source Mounting
• Feedthrough Installation
• Vacuum Side Connections
• HCES Installation
• Atmosphere Side Connections
• Electrical Continuity
• Controller Interlocks
• Post Installation.
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