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Chapter 7: Maintenance
General
The Mark series ion source requires periodic inspection and preventive
maintenance to assure reliable and trouble-free performance. As with any
vacuum or plasma-based process, the need for maintenance may be trig-
gered by various events which depend on the particular application and
process. Here are some examples:
• build-up of thick films and coatings (conductive or insulat-
ing) on the anode or other source components
• process related formation of loose flakes and debris on the
source assembly
• failed or unreliable cathode operation (end-of-life of HCES
tip)
• thinning and/or perforation of the ion source's gas distribu-
tor
• frequent anomalous electrical or source control events, as
indicated on the Mark series Controller display: arcing,
strong spikes, or drifts in current and flow response or
• drifting or high variance in process operation or reduced
product yield.
If the following maintenance techniques are routinely performed,
unscheduled disruption of production processes may be minimized. They
are intended as guidelines to help the operator develop systematic proce-
dures and processes that are specific to the individual installation and
application.
Obtain, read and understand the Material Safety Data Sheet (MSDS) for
any chemicals or materials referenced in this chapter. Follow all local pro-
cedures in the safe handling and use of these materials, including the use
of any required personal protective equipment.
To avoid electrical shock, keep clear of “live” circuits. Follow all
local lock-out/tag-out procedures before performing any mainte-
nance.
Veeco strongly recommends servicing the source’s anode assembly out-
side the process chamber. This minimizes chamber contamination and
possible base assembly damage. A spare anode assembly (available sepa-
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