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Removes surface contaminants to improve film/substrate adhesion.
Assists film growth, adhesion, and hardness by ion bombardment.
Unpack and inspect the ion source for damage and verify all accessories.
Check recommended facilities and components required for source and HCES operation.
Procedure for installing 1-inch O-ring or 2.5-inch metal seal feedthroughs.
Connect gas, coolant, and electrical lines to vacuum side feedthroughs.
Attach HCES assembly and connect its gas and electrical leads.
Connect coolant lines, facility gas service, and source cable to atmosphere side.
Verify electrical continuity and check for shorts between source and controller.
Install and verify vacuum and coolant interlocks for safe operation.
Final checks: inspect connections, pump down, and leak test.
Verify all connections and pump down the process chamber to base pressure.
Steps for controller power-up, auto mode configuration, and settings.
Access Select Function dialog to configure the unit.
Configure initial settings for manual or automatic operation.
Steps to start and sustain source operation from ignition to steady state.
Steps to initiate automatic operation via the controller.
Procedures for venting the chamber and cooling down the source.
Steps to remove the anode assembly from the process chamber and disassemble.
Reassemble the source by reversing the disassembly steps.
Perform periodic inspection and preventive maintenance for reliable performance.
List of recommended materials for facilitating maintenance tasks.
Procedures for maintenance activities performed within the process chamber.
Guidelines for preventive maintenance intervals for ion source components.
Contact details for Veeco Instruments Inc. for service and parts.
General specifications for the Mark II fluid cooled ion source.
Minimum facilities required for source start-up and operation.
Details on performance characteristics for the low voltage source configuration.
Representative data showing input gas flow vs. anode potential/current.
Removes surface contaminants to improve film/substrate adhesion.
Assists film growth, adhesion, and hardness by ion bombardment.
Unpack and inspect the ion source for damage and verify all accessories.
Check recommended facilities and components required for source and HCES operation.
Procedure for installing 1-inch O-ring or 2.5-inch metal seal feedthroughs.
Connect gas, coolant, and electrical lines to vacuum side feedthroughs.
Attach HCES assembly and connect its gas and electrical leads.
Connect coolant lines, facility gas service, and source cable to atmosphere side.
Verify electrical continuity and check for shorts between source and controller.
Install and verify vacuum and coolant interlocks for safe operation.
Final checks: inspect connections, pump down, and leak test.
Verify all connections and pump down the process chamber to base pressure.
Steps for controller power-up, auto mode configuration, and settings.
Access Select Function dialog to configure the unit.
Configure initial settings for manual or automatic operation.
Steps to start and sustain source operation from ignition to steady state.
Steps to initiate automatic operation via the controller.
Procedures for venting the chamber and cooling down the source.
Steps to remove the anode assembly from the process chamber and disassemble.
Reassemble the source by reversing the disassembly steps.
Perform periodic inspection and preventive maintenance for reliable performance.
List of recommended materials for facilitating maintenance tasks.
Procedures for maintenance activities performed within the process chamber.
Guidelines for preventive maintenance intervals for ion source components.
Contact details for Veeco Instruments Inc. for service and parts.
General specifications for the Mark II fluid cooled ion source.
Minimum facilities required for source start-up and operation.
Details on performance characteristics for the low voltage source configuration.
Representative data showing input gas flow vs. anode potential/current.
General| Brand | Veeco |
|---|---|
| Model | Mark II |
| Category | Controller |
| Language | English |
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