63
Appendix A: Specifications
General
Source model:
Mark II fluid cooled with HCES
Cathode type: hollow cathode
Cooling
a
water, 1.5 /min. (0.4gpm) minimum flow
Dimensions (length x diameter): 111mm x 140mm (4.4 in. x 5.50 in.)
Weight (source only): 5.9kg (13 lbs.)
Maximum discharge power (discharge volt-
age x discharge current):
3000W
Power Rejection/Load
60% of input source power (typical)
2000W (maximum)
Discharge (anode) voltage, V
A
b
original design –
argon: ~50 to 300V
oxygen: ~110 to 300V
low voltage option –
argon: ~40 to 300V
oxygen: ~75 to 300V
Mean ion beam current energy: 30 to 180eV (~60% of anode voltage set point)
Discharge (anode) current, I
A
:
Mark II HO Controller: ~1.0 to 10A @V
A
=300V
Mark III Controller: ~1.0 to 15A @V
A
=200V
Maximum ion beam current:
~3 to 3.5A(~25% of I
A
@ 30cm from the source)
c
Maximum operating pressure:
1.33x10
-1
Pa (1.0 x10
-3
Torr)
Permissible gas types
a.,
d
Oxygen, nitrogen, argon (and other inert gases)
Gas flow range:
5 to 100sccm
e
NOTES
a. Refer to “Facilities Requirements” on page 64 for grade/quality information.
b. The lower voltage range depends on current settings and available gas flow capacity. Refer to
“Source Performance” on page 65.
c. The total ion beam current diminishes with distance from the source.
d. Direct injection only. Other reactive gases may be introduced downstream of the source for deposi-
tion applications.
e. The vacuum system’s pumping speed may affect actual gas flow requirements.
To Next Page