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Chapter 1: Safety
Understanding the correct installation, operation, and maintenance pro-
cedure is necessary for safe and successful operation. This symbol pre-
cedes safety messages in this manual, along with one of the three signal
words explained below. Obey the messages that follow these words to
avoid possible injury or death.
This symbol marks an imminent hazard which will kill or injure if
ignored.
This symbol marks a potential hazard which may kill or injure if
ignored.
This symbol marks a potential hazard which may cause minor injury
if ignored.
This symbol marks a potential hazard which may cause damage if
ignored.
Please read the following before continuing:
To avoid electrical shock, keep clear of “live” circuits. Follow all
local lock-out/tag-out procedures before repairing or replacing any
electrical devices.
It is recommended that only trained, qualified persons using established
safety procedures perform any work related to the installation, start-up,
operation or maintenance of this system.
Ion source surfaces may exceed 300°C (570°F) after use and venting.
Avoid burns during servicing by using appropriate personal protec-
tive equipment and allowing for a sufficient cool down interval.
Obtain, read and understand the Material Safety Data Sheet (MSDS) for
any chemicals and materials referenced in this technical manual. Follow
all local procedures in the safe handling and use of these materials, includ-
ing the use of any required personal protective equipment.
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