Veeco Mark II - Recommended Service and Preventive Maintenance Intervals

52
Anode Assembly Maintenance
Refer to ”FIGURE 7.3” on page 51 and FIGURE 7.4 when performing
these steps.
1. Place the anode assembly to be serviced on a work surface that has
been cleaned of oil, particles, fibers and other contaminants.
FIGURE 7.4 Anode Assem-
bly Maintenance (contin-
ued).
Reassemble.
Extensive wear or
damage present?
Replace thermal transfer
sheet(s).
Y
N
Inspect the
thermal transfer sheet.
Clean.
Extensive wear or
damage present?
Replace thermal transfer
plate.
Y
N
Inspect the
thermal transfer plate.
Clean.