© 2006 Veeco Instruments Inc. All rights reserved.
Veeco Instruments Inc.
2330 E. Prospect Road, Ft. Collins, CO 80525
970.221.1807
The information contained in this document is believed to be accurate and reliable. However, Veeco Instruments Inc. cannot
accept any financial or other responsibilities that may result from the use of this information. No warranties are granted or
extended by this document. It is the policy of Veeco Instruments Inc. to improve products as new technology, components and
materials become available. Veeco Instruments Inc. therefore reserves the right to change specifications without prior
notice.
This manual is intended for qualified personnel who are responsible for servicing and or running Veeco Instruments Inc. ion
beam processing systems and equipment. The information contained in this manual is the sole property of Veeco Instru-
ments Inc. and may not be reproduced, distributed, or transmitted in any form without the written permission of Veeco
Instruments Inc. Mark™II
⊕
is a trademark of Veeco Instruments Inc. All other trademarks are property of their respective
companies. This product is protected by one or more of the following patents: US Patents - 7,342,236; 7,439,521; 7,425,711;
7,476,869; 7,566,883; Korean Patent – 10-0860931; other regional patents pending.
Manual # 427361 Rev. D
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