Veeco Mark II - Page 76

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FIGURE B.12 Total Ion Beam
Current vs. Anode Voltage at
R=30cm.- Low Voltage Option
(Oxygen).
Total Beam Current for Oxygen at R=30 cm
0
0.5
1
1.5
2
2.5
3
3.5
50 75 100 125 150 175 200 225 250
Anode Potential (V)
Total Integrated Beam Current (A)
1A
3A
5A
7.5A
10A
15A