E
EC FC11944 ADDITION OF LOW VOLTAGE OPTION
TR
07-10-08
SAT
E
MAX. POWER REJECTION
LOAD: 2000W
REDUCER FTTGS
POWER CABLE
110V AC
FLOW
FACILITY POWER
USER
USER WASTE WATER
.25 TO .125 SWAGE
MIN. 185 degs F (85 degs C)
USER SUPPLIED
.25 SWAGELOK
CHAMBER
P
2X
FLOW
GAS SUPPLY
USER SOURCE
GAS SUPPLY
USER HCES
P.S. INTERLOCK
RECOMMENDED FOR
PRESSURE GAUAGE
MAX TEMP: 104 degs F (40 degs C)
USER WATER SUPPLY
MIN FLOW: 0.4 gpm ; 1.5 l/m
MIN TEMP: 50 degs F (10 degs C)
INTERLOCK CABLE
USER SUPPLIED
CONTACT)
(NORMALLY OPEN
MIN. .25 O.D. TUBE; RATED
MIN. 100 PSI (690kPa)
FLOW SWITCH
REQD. FOR P.S.
INTERLOCK
REQUIRED USER SUPPLIED: MAGENTA DASHED
REQUIRED USER OR VEECO SUPPLIED: MAGENTA
2X OPTIONAL
MFC
OPTIONAL MOUNT
ASSY C17519
OPTIONAL ITEMS: GREEN
OPTIONAL USER SUPPLIED ITEMS: GREEN DASHED
.25 SWAGE TYP.
CONTROLER
37317-3: 45.0 FT
-THIS DIAGRAM SHOWS THE MARK II + SOURCE. THE FACILITIES
THE FEEDTHROUGH IS 5psi (34kPa)
SPECS. ABOVE)
(SEE FLOW
426674-CE / 426675-CE
MARK III PLUS
NOTES:
SOURCE GAS
2X
- ALL FDTH-S SEAL ON VACUUM SIDE OF CHAMBER.
* MFC CABLES ARE STANDARD FOR MKS OR BROOKS MFC-s.
1ST PIN IS SUB-D INTERFACE. CONSULT MKII/MKIII PLUS
POWER SUPPLY MANUAL FOR COMPLETE PIN-OUTS.
**MINIMUM INPUT/OUTPUT COOLANT PRESSURE DELTA AT
HCES GAS
MASS FLOW
MASS FLOW
POWER SUPPLY
MARK II PLUS HO
.125 SWAGELOK
CONTROLER
CONNECTIONS ALSO APPLY TO THE MARK II SOURCE
* 4X MFC CABLE
37317-1: 20.0 FT
POWER SUPPLY
426745-CE
VEECO OPTION #
423924 ADAPTED
WITH LOW FLOW
ORIFICE AS
SUPPLIED BY
MANUFACTURE.
INCLUDES ASSY
INSTRUCTION
BULLETIN #157261.
KEY FOR MARK II+ HCES FLUID COOLED ASSY HOOKUP
VEECO SUPPLIED: BLACK
OPTIONAL RS 232
CONTROL CABLE
(426758:16 FT)
426830: 1 IN
(427355-1: 20.0 FT)
DC POWER CABLE
427365: 2.75 IN
** WATER FDTH
426847: 1 IN
(427355-2: 40.0 FT)
610005: 2.75 IN
20A; 250V
(8.0 FT)
DC POWER FDTH
POWER IN CABLE
LV 427915 SOURCE ASSY
427805 HCES ASSY
427073 SOURCE ASSY OR
GAS FDTH
426991: 1 IN
427374: 2.75 IN
HCES CABLE
TO CHANNEL 4
OR
DATE
ALL THREADS CLASS 2
DIMENSIONED IN ACCORDANCE WITH
DO NOT SCALE DRAWING
VEECO INSTRUMENTS
1
1
SHEET
OF
VEECO INSTRUMENTS AND MAY NOT
BE USED, REPRODUCED, PUBLISHED
THIS DRAWING IS THE PROPERTY OF
EXPRESS AUTHORIZATION BY
OR DISCLOSED TO OTHERS WITHOUT
VEECO INSTRUMENTS
THIRD ANGLE PROJECTI ON
REV
PART NUMBER
TITLE
SCALE
C
1:4
(HOOK-UP DIAGRAM)
PACKAGE ASSEMBLY
HCES FLUID COOLED
MARK II+
E
427073 DIAG
11-20-06
LM
11-28-06
CHANGE
CHK
CHG
DATE
CHECK
FAO
32
SURFACE FINISH
DATE
ENGR
DATE
MFG ENGR
DATE
PROJ MGR
DRAWN
DATE
UNLESS OTHERWISE SPECIFIED:
ASME Y14.5M-1994 STANDARDS
REMOVE ALL BURRS AND SHARP EDGES
LM
SAT
11-28-06
SAT
11-6-06
TR
.XXXX
.XXX
.XX
.02
.005
.0005
.X
.1
.5
.X
TOL [mm]
.XX
.XXX
.013
.13
TOL in.
ANGLE
±
1 deg.
UNITS: INCHES [ mm]
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