Name: Zeiss GeminiSEM Series
Brand: Zeiss
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Instruction Manual

ZEISS GeminiSEM series

Field Emission Scanning Electron Microscope

Table of Contents3
General Information7
Text Conventions and Link Types7
Explanation on Warnings and Additional Information8
Further Applicable Documents9
Contact9
Safety10
Intended Use10
General Safety Information11
Safe Operation Conditions11
Requirements for Personnel11
Preventive Maintenance12
Safe Handling of Spare Parts12
Prevention of Hazards12
Biological Hazards12
Burn Hazards13
Chemical Hazards13
Electrical Hazards14
High Pressure Hazards14
Care and Maintenance14
Magnetic Field Hazards15
Mechanical Hazards15
Radiation Hazards16
Suffocation Hazards16
Warning Labels and Lights17
Warning Labels17
Troubleshooting17
Safety Devices and Interlocks20
Protective Cover Panels20
Main Switch21
Circuit Breaker22
Emergency off (EMO) Option External22
Emergency off (EMO) Option Internal23
Locking Devices24
Lockout/Tagout Equipment25
Product and Functional Description26
System Overview26
Main Components28
Vacuum System28
Decommissioning and Disposal28
Vacuum System Pressure Modes29
Technical Data and Conformity33
Electron Optical Column | Gemini 134
Electron Optical Column | Gemini 236
Electron Optical Column | Gemini 338
Gun Modes39
Detectors40
Specimen Stage44
Dual Joystick45
Optional Components and Accessories46
Optional Detectors46
Control Panel60
Software Description62
Smartsem62
Installation67
Commissioning and First Operating Steps68
Prerequisites for Commissioning and Operation69
Switching on the Microscope System69
Energizing the Microscope69
Starting the Microscope71
Starting the Software72
Calling up the Help72
Keyboard Shortcuts72
Acquiring an Image74
Preparing the Specimen Holder74
Loading the Specimen Chamber76
Locating the Specimen79
Switching on the Gun80
Switching on the EHT80
Acquiring an Image81
Optimizing the Image83
Saving the Image85
Modifying Gun Parameters85
Selecting the Gun Mode85
Setting the Probe Current86
Continuously Modifying the Probe Current (License: OPTIPROBE)86
Measuring the Probe Current87
Changing the Extractor Voltage88
Working with Different Aperture Configurations and Beam Modes89
Determining the Installed Aperture Configuration | Gemini 1 Column and Gemini 3 Column89
Determining the Installed Aperture Configuration | Gemini 2 Column89
Selecting the Aperture90
Selecting the Column Mode90
Finding Appropriate Detector Settings91
Selecting a Detector91
Setting up the Inlens SE Detector92
Setting up the SE Detector92
Setting up the VPSE Detector93
Setting up the C2D Detector94
Setting up the Asb Detector95
Setting up the Asb4 Detector96
Setting up the Absd/Absd-LH/VP-BSD Detector98
Setting up the YAG BSD Detector99
Setting up the Esb Detector100
Setting up the SCD Detector101
Setting up the Astem Detector101
Setting up the CL Detector103
Working with Variable Pressure103
Changing to Standard VP Mode104
Using Nano VP or XVP Mode105
Returning to HV Mode111
Shutting down the System112
Finishing the Work Session112
Energizing the Microscope112
Performing a Lockout/Tagout113
Performing an Emergency Shutdown113
Safety During Cleaning and Maintenance114
Maintenance Schedule114
Maintenance Work114
Change of Consumables and Chemicals114
Care and Cleaning Work115
Cleaning the Microscope115
Overall System118
Checking the CAN Communication118
Chamber119
Initializing the Stage119
Defining the Post Initialization Position of the Stage119
Changing the Joystick TV Angle120
Replacing the Chamber Door Seal120
Resetting the Touch Alarm122
Checking the Water Flow and Temperature122
Column122
Baking out the Gun Head122
Calibrating the Probe Current123
Calibrating the Stigmator124
Power Circuit124
Checking the Position of the Circuit Breakers124
Detectors125
Lubricating the Rod125
Apertures126
Cleaning the Beamsleeve Apertures126
Cleaning up the PC127
Decommissioning128
Transport and Storage129
Disposal132
Decontamination132
System Layout133
Performance Data and Specifications | Geminisem 360133
Performance Data and Specifications | Geminisem 460139
Performance Data and Specifications | Geminisem 560145
Installation Requirements151
Layout and Connections153
Applicable Standards and Regulations154

Brand	Zeiss
Model	GeminiSEM Series
Category	Medical Equipment
Language	English

Zeiss GeminiSEM Series User Manual

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Zeiss GeminiSEM Series Specifications

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