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Zeiss GeminiSEM Series User Manual

Zeiss GeminiSEM Series
164 pages
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Instruction Manual
ZEISS GeminiSEM series
Field Emission Scanning Electron Microscope

Table of Contents

Questions and Answers:

Zeiss GeminiSEM Series Specifications

General IconGeneral
BrandZeiss
ModelGeminiSEM Series
CategoryMedical Equipment
LanguageEnglish

Summary

1 General Information

1.1 Text Conventions and Link Types

Defines text formatting and link types used in the manual for clarity.

1.2 Explanation on Warnings and Additional Information

Explains signal words DANGER, WARNING, CAUTION, NOTICE and their meanings.

1.3 Further Applicable Documents

Lists other relevant documents and resources for users.

1.4 Contact

Provides contact information for ZEISS Sales & Service Partners and headquarters.

2 Safety

2.1 Intended Use

Details the intended applications of the microscope system, including imaging and analytics.

2.2 General Safety Information

Outlines essential safety principles and requirements for operating the microscope system.

2.3 Prevention of Hazards

Summarizes potential hazards and recommended safety precautions for safe operation.

2.4 Warning Labels and Lights

Describes warning labels and lights on the microscope system indicating potential hazards.

2.5 Safety Devices and Interlocks

Explains safety devices and interlocks designed to prevent injuries and property damage.

3 Product and Functional Description

3.1 System Overview

Provides an overview of the main components of the SEM workstation.

3.2 Main Components

Details the main physical components of the microscope system.

3.2.3 Electron Optical Column | Gemini 1

Describes the electron optics and components of the Gemini 1 column.

3.2.4 Electron Optical Column | Gemini 2

Details the electron optics and components of the Gemini 2 column.

3.2.5 Electron Optical Column | Gemini 3

Explains the electron optics and components of the Gemini 3 column.

3.2.6 Gun Modes

Describes the different operating modes for the electron gun: Normal, Imaging, and Analytic.

3.2.7 Detectors

Introduces the various detectors used for signal detection in SEM imaging.

3.2.7.3 InLens SE Detector

Details the InLens SE detector for high-resolution SE imaging and surface topography.

3.2.7.4 SE Detector

Describes the Everhart-Thornley SE detector for detecting SE and BSE signals.

3.2.8 Specimen Stage

Describes the motorized eucentric specimen stage for specimen navigation.

3.2.9 Dual Joystick

Details the dual joystick used for stage control and specimen navigation.

3.3 Optional Components and Accessories

Lists and describes optional components and accessories for the SEM.

3.3.1 Optional Detectors

Lists and describes various optional detectors available for the SEM.

3.3.1.1 C2D Detector

Explains the Cascade Current Detector (C2D) for secondary electron imaging under variable pressure.

3.3.1.2 VPSE Detector

Details the VPSE detector for variable pressure applications and non-conducting specimens.

3.3.1.3 EsB Detector

Describes the EsB detector for SE and BSE detection, enabling high contrast topography.

3.3.1.4 aBSD-LH Detector

Explains the aBSD-LH detector for high efficiency material characterization at low kV.

3.3.1.6 aBSD Detector

Details the aBSD detector for material characterization and topographical contrast.

3.3.1.7 YAG BSD Detector

Guides on setting up the YAG BSD detector for high-speed imaging.

3.3.1.9 AsB Detector

Details the AsB detector integrated into the Gemini lens for BSE detection at short working distances.

3.3.1.10 aSTEM Detector

Describes the aSTEM detector for compositional and topographical imaging of ultrathin specimens.

3.3.1.11 CL Detector

Explains setting up the CL detector for structural examination.

3.3.2 Control Panel

Describes the control panel used for accessing frequently used functions.

3.4 Software Description

Introduces the SmartSEM software, its user interface, and controls.

3.4.1 SmartSEM

Details the graphical user interface (GUI) of the SmartSEM software.

4 Installation

5 Commissioning and First Operating Steps

5.1 Prerequisites for Commissioning and Operation

Lists prerequisites for successful commissioning, including training and manual understanding.

5.2 Switching On the Microscope System

Details the procedure for powering up and energizing the microscope system.

5.3 Starting the Software

Guides users on launching and logging into the SmartSEM software.

5.4 Acquiring an Image

Provides a step-by-step guide to acquiring an SEM image using the SE detector.

5.5 Modifying Gun Parameters

Covers adjusting gun parameters to optimize the electron beam.

5.6 Working with Different Aperture Configurations and Beam Modes

Discusses aperture configurations and beam modes for optimizing SEM performance.

5.7 Finding Appropriate Detector Settings

Guides on selecting and setting up appropriate detectors for different applications.

5.8 Working with Variable Pressure

Covers operating the microscope in variable pressure modes for non-conducting specimens.

5.9 Shutting down the System

Guides users through the process of safely shutting down the microscope system.

5.10 Performing an Emergency Shutdown

Outlines the procedure for performing an emergency shutdown of the microscope.

6 Care and Maintenance

6.1 Safety During Cleaning and Maintenance

Emphasizes safety precautions during cleaning and maintenance tasks.

6.2 Maintenance Schedule

Provides recommended intervals for preventive maintenance based on system uptime.

6.3 Maintenance Work

Specifies that maintenance work should only be performed by authorized ZEISS personnel.

6.4 Care and Cleaning Work

Outlines general care and cleaning procedures, stressing authorized personnel for non-described tasks.

7 Troubleshooting

7.1 Overall System

Addresses troubleshooting issues related to the overall system and its components.

7.2 Chamber

Focuses on troubleshooting issues related to the specimen chamber.

7.3 Column

Focuses on troubleshooting issues related to the electron optical column.

7.4 Power Circuit

Covers troubleshooting related to the microscope's power circuit and circuit breakers.

7.5 Detectors

Addresses troubleshooting and maintenance for various detectors.

7.6 Apertures

Covers maintenance and cleaning of the microscope apertures.

7.7 PC

Provides guidance on maintaining the PC connected to the microscope.

8 Decommissioning and Disposal

8.1 Decommissioning

Outlines the process for shutting down and securing the system for extended periods.

8.2 Transport and Storage

Details procedures and precautions for transporting and storing the microscope system.

8.3 Disposal

Explains the proper disposal methods for the microscope system and its components.

9 Technical Data and Conformity

9.1 System Layout

Illustrates the physical layout and connections of the microscope system.

9.2 Performance Data and Specifications | GeminiSEM 360

Lists performance data and specifications for the GeminiSEM 360 model.

9.3 Performance Data and Specifications | GeminiSEM 460

Lists performance data and specifications for the GeminiSEM 460 model.

9.4 Performance Data and Specifications | GeminiSEM 560

Lists performance data and specifications for the GeminiSEM 560 model.

9.5 Installation Requirements

Details the requirements for installing the microscope system, including site and environmental needs.

9.6 Applicable Standards and Regulations

Lists relevant safety, environmental, and EMC standards the system complies with.

10 Parts and Tools

10.1 Tools and Accessories

Details the tools and accessories provided with the GeminiSEM, including the beamsleeve kit.

Glossary

Index

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