4
Troubleshooting
OVERVIEW
This chapter covers the basic troubleshooting for the ADT 7100. For any errors or alarms
not covered in this document, please create a hardware issue LNF Helpdesk ticket and fill out the
logbook, including details of the alarm.
4.1 VIEWING ALARMS
Alarms are classified as warnings (yellow) or errors (red). The alarms pop up as floating
windows. Normally, the warnings allow the user to continue, but they need to be considered to
assess the related risks. The errors are potentially dangerous to the tool and the samples. When in
doubt, stop and create a helpdesk ticket requesting staff assistance.
4.2 KNOWN SOFTWARE BUGS
● There may occasionally be a missing parameter report when you open your recipe. Just
click close. It will add any missing parameters.
● After aligning the second angle using Manual Wafer Align, the wafer view window may
not display the cut lines. If you wish to see them, index down once.
● Setting the cut position outside of the wafer area displayed on the screen will cause an
error, and the software will freeze.
● In the newly installed software version, the depth of the Y-Offset cut is now the
shallowest cut of multi-pass recipes. Therefore, it will no longer cut all the way through
your wafer in one pass for these recipes.
● If performing a manual Y-Offset, it is recommended that you do so using the first angle
(typically the angle zero).
Lurie Nanofabrication Facility 4-1
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