ADT 7100 - Custom Recipes

ADT 7100 User Manual Supported Processes
Example with multiple depths
More than one pass per cut may be desirable when a workpiece is made of a tough
material or is very thick. Using multiple passes can reduce blade wear and is done using multiple
indexes with a value set to zero. The first Index (idx 0) is the Main Index which specifies the
distance between cut lines. The other indexes are sub-indexes that specify a different Depth
(distance between the surface of the chuck and bottom of the blade). This can be done for each
angle in the recipe.
In the following example, the main index is 10 mm; therefore, the distance between cut lines
(or streets) will be 10 mm. But each street has four passes, each one 200 um deeper than the
previous one. The pattern will repeat across the entire wafer.
category
parameter name
idx
value
units
Cut
Depth
0
675
microns
1
475
microns
2
275
microns
3
2
mil
Index
0
10
mm
1
0
mm
2
0
mm
3
0
mm
3.2 CUSTOM RECIPES
The process recipe will need to be carefully prepared for materials out of the ordinary or for
samples having no standard shapes. If you cannot find a suitable recipe in the standard group,
create a helpdesk ticket so staff can evaluate the process and recommend the best solution.
Lurie Nanofabrication Facility 3-6