ADT 7100 - Page 30

ADT 7100 User Manual Supported Processes
Examples with just one depth and multiple indexes
The following examples show how the parameters would look like for a specific angle. You
can see a diagram indicating the space between the cutting lines based on the specified indexes
on the right side. All the cuts will have a depth of 2 mils in all these examples and will be cut in
one pass.
category
parameter name
idx
value
units
Cut
Depth
0
2
mil
Index
0
20
mm
category
parameter name
idx
value
units
Cut
Depth
0
2
mil
Index
0
20
mm
1
7
mm
category
parameter name
idx
value
units
Cut
Depth
0
2
mil
Index
0
20
mm
1
7
mm
2
10
mm
Lurie Nanofabrication Facility 3-5