2
Operating Procedure
OVERVIEW
This chapter covers the essential operation of the tool. If any problems are encountered
during tool operation, please refer to the chapter on troubleshooting.
2.1 BEFORE YOU START
Before starting a reservation, make sure your samples meet the requirements in the
system overview, especially if you are planning on further processing in the LNF cleanroom.
While operating the tool, a reservation must be active in the LNF Online Services.
2.2 FILL OUT THE LOGBOOK
A logbook entry must be completed for any activated reservation on the tool, even if the
tool cannot be operated. Required data includes the date, user, recipe, blade, diced material, and
thickness of the diced material.
Lurie Nanofabrication Facility 2-1
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