ADT 7100 User Manual System Overview
1.5 Personnel Qualifications/Responsibilities
You must be authorized by a tool engineer or be accompanied by an authorized user to use
this tool. Improper use, failure to follow this SOP, failure to fill out the logbook, and leaving
unqualified users unattended will result in loss of authorization.
Training and Checkout Procedure
Follow this procedure to receive authorization to run supported processes. Practicing with an
authorized user or staff member is strongly recommended but not required.
1. Read this user manual.
2. Accurately complete the checkout quiz (you may retake if necessary).
3. Create a helpdesk ticket requesting training. An authorized trainer will schedule a time
for training.
4. You may practice with your mentor or another authorized user until you are comfortable
with tool operation.
5. Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this
checkout is successful, given the successful completion of the quiz, the engineer will
authorize you on the tool.
Advanced User Authorization (Superuser access)
The user needs to prove good proficiency in the tool to run custom processes (e.g.,
multiple passes, different depths, etc.). Additional training is required.
1. Fill out the next form: Superuser Form
2. Create a helpdesk ticket requesting superuser access.
3. Arrange a training session with a tool engineer via the ticket.
4. A tool engineer will provide the superuser access code after completing the training and
demonstrating proper tool operation. Do not share the access code.
Lurie Nanofabrication Facility 1-6
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