ADT 7100 - Page 29

ADT 7100 User Manual Supported Processes
3.3 MODIFY INDEX AND DEPTH PARAMETERS
Things to consider before modifying your recipe:
- Superuser access is required to change the Depth parameter.
- To avoid confusion, it is best to select the reference cut position (after the manual
alignment) at the beginning of your first pattern at the top of the workpiece.
The index parameter refers to the distance between cuts. Multiple Indexes can be defined for
a Workpiece. The first Index (idx 0) is the Main Index, and subsequent Indexes are sub-indexes.
The depth parameter refers to the distance between the surface of the chuck and the bottom of
the blade. Each Index can have a different Depth value as well. This can be done for each angle
in the recipe. Next, we will show some examples to illustrate how the index and depth
parameters function.
Adding indexes
To modify a recipe to have multiple indexes,
1. Click on Cut in your recipe in the tree on the left.
2. Click on the tab for the angle you wish to modify, for example, angle 0/1.
3. Click on Index in the recipe area.
4. In the Parameter area near the bottom of the window, select the Category Cut.
5. Select the Index Parameter.
6. Click the Add button once for each Index you wish to add.
7. Change the units and values in the recipe to correspond to your pattern.
Adding Depths
If there is only one Depth parameter, all cuts will be at that depth. If you wish to cut each index at a
different depth, you must add a Depth for each index. If there is more than one Depth, there must be as
many Depth parameters as indexes. The depth idx will correspond to the index idx in the recipe.
To modify a recipe to have a different depth for each index
1. Click on Cut under your recipe in the tree on the left.
2. Click on the tab for the angle you wish to modify, for example, angle 0/1.
3. Click on Depth in the recipe area.
4. In the Parameter area near the bottom of the window, select the Category Cut.
5. Select the Depth Parameter.
6. Click the Add button once for each Depth you wish to add.
7. Change the units and values in the recipe to correspond to your pattern.
Lurie Nanofabrication Facility 3-4