ADT 7100 - Page 28

ADT 7100 User Manual Supported Processes
3.2 CREATE OR MODIFY A RECIPE
When in doubt, stop and create a helpdesk ticket to request support from the LNF staff. If you feel
confident to create a new recipe, or modify an existing one, follow these steps.
1. Click the quick access bottom to display the Programming Workspace, also known as
the Recipe Editor.
2. If you don’t have a recipe to use, copy a standard recipe (from the standard group). You will need
to click duplicate, name it using your LNF username, and save it in the User group. Please try to
minimize your number of recipes as this affects the computer performance.
Note: Keeping the recipes is not guaranteed. Please be sure you note the recipe parameters in
case you need to create it from scratch.
3. Select your recipe
a. Expand the Users recipe group in the Programming tree on the left by clicking the “+”
next to Users.
b. Select your Recipe from the Programming tree by clicking on it. The properties for the
Recipe are displayed on the right.
4. Defining Recipe Properties
a. Users can modify the values of parameters in the Recipe that they have read-write
access to.
b. Expand your Recipe to display the parameter categories.
c. Click on Cut or any other parameter category in the Programming tree. The parameters
for the Recipe are displayed in the Parameter Table in the upper right pane of the
Programming Workspace.
d. Select the desired units from the Units drop-down list for the parameter being modified.
The type of units varies with the parameter type.
e. In the Parameter Table, double-click the Value cell of the parameter to be modified. If
the User can choose from among a list of preset values, a drop-down list appears in the
cell. Otherwise, a blinking cursor appears.
Note: Sometimes, if you make too many mouse clicks, the units text from the pull-down
menu is put into the parameter box. You will need to reload the recipe. If this occurs, do
not save the recipe. Any changes previously made will be lost.
f. Select a value from the drop-down list or enter the value directly. Only values within the
min and max range are valid.
Note: The recipe parameters most commonly changed are index and depth. You can find
some recipe examples and more detailed instructions to change them in the following
sections.
5. Click Save , and wait for the computer to save the recipe. Then, the System checks the
required parameters in the Recipe, and the Recipe is saved to the System.
Note: If the Missing Parameters Report is displayed, click Close to add the missing parameters to
the recipe using default values.
Lurie Nanofabrication Facility 3-3