ADT 7100 - Page 27

ADT 7100 User Manual Supported Processes
The recipes are located in the Standard recipe group in the Programming Workspace. Do not edit
these recipes as it will affect the following users that copy them. Length parameters can be specified in
inches, millimeters, microns, etc., by selecting the units from the units pull-down menu. The following
table shows some of the standard recipe parameters. Regular users can modify the items highlighted in
green.
Recipe parameter
Description
Typical Value
Blade
The name of the blade assigned to the recipe.
00777-1045-008,
S1230-Q5HH-000
Wafer Shape
The shape of the workpiece.
Circular, Rectangular
Wafer Diameter
The diameter of the workpiece.
Only used for Circular workpieces.
4”, 6”
Wafer Width (Y)
The dimension of the workpiece along the Y-Axis. Only
used for Rectangular workpieces
Wafer Length (X)
The dimension of the workpiece along the X-Axis. Only
used for Rectangular workpieces
Wafer Thickness
The thickness of the workpiece
500 um, etc.
Tape Thickness
The thickness of the mounting blue tape
3 mil
Min Exposure Left
The minimum blade exposure permitted considering the
wafer thickness, etc.
2 mil
Cut Entry Speed
The speed of the Cutting Chuck in the X direction during
the entry to the workpiece
2.5 to 5 mm/sec
Cut Exit Speed
The speed of the Cutting Chuck in the X direction during
the exit from the cut
2.5 to 5 mm/sec
Cutting Speed
The speed of the Cutting Chuck in the X direction during
the cut
5 to 10 mm/sec
Overcut
The distance for which the entry and exit speed is
maintained to ensure the Blade enters and exits the
workpiece at the specified speed.
8 mm
Overtravel
The distance along the X-Axis that is added to the cut to
ensure that all cuts begin from beyond the edge of the
workpiece
3 mm
Spindle Speed
The rotational speed of the Spindle
24000 to 30000 RPM
Height Check Units
The unit of measurement for blade height checks
Number of cuts
Height Check Rate
How often blade height (exposure) is checked
10 to 100
Coaxial Illumination
After Cut
Defines the Coaxial illumination intensity for the
inspection that is done after the cut.
30
Oblique Illumination
After Cut
Defines the intensity of Oblique Illumination for the
Manual Inspection after cut
15
Depth
How close to the chuck to cut or amount of material
left after cut if not cutting through
2 mil
Index
The distance along the Y-Axis between adjacent cuts in a
Workpiece. The first Index is the Main Index, and
subsequent Indices are subindices. Each Index can have a
different Cut Depth and Speed. It can be taught or entered
manually.
Equal to the size of the die
Lurie Nanofabrication Facility 3-2