14 5975/5977 Series MSD Operation Manual
1 Introduction
Vacuum gauge
The MSD may be equipped (or ordered) with an ion vacuum gauge. The
OpenLAB CDS Acquisition software can be used to read the pressure (high
vacuum) in the vacuum manifold. Operation of the gauge controller is
described in this manual.
Table 3 5977B Series MSD features
Feature
High vacuum pump Diffusion Turbo
Optimal He column flow
mL/min
1 1 to 2
Maximum recommended
gas flow mL/min
*
* Total gas flow into the MSD: column flow plus reagent gas flow (if applicable).
Based on helium gas use. For other gases the maximum flow will vary.
1.5 4
Maximum gas flow, mL/min
†
† Expect degradation of spectral performance and sensitivity.
2 6.5
Max column id 0.25 mm (30 m) 0.53 mm (30 m)
Inert ion sources available Yes Yes
Foreline pumps available Pfeiffer Duo 2.5 Pfeiffer Duo 2.5, MVP-070-3,
MVP-070-3C, IDP3 24V
DIP
‡
capability (3rd party)
‡ Direct insertion probe.
Yes Yes