15
SH-110 Dry Scroll Vacuum Pump
D R A F T 4 / 1 7 / 1 2
Technical Information
Table 1 Specifications
Model SH-110 Dry Scroll Single Hermetic Vacuum Pump
Interface dimensions See Figure 1 on page 16
Peak pumping speed 50 Hz: 90 L/m, 5.4 m
3
/hr (3.3 cfm)
60 Hz: 110 L/m, 6.6 m
3
/hr (4.0 cfm)
See Figure 2 on page 16 for details
Media No corrosive, explosive or particulate forming gases
Ultimate pressure 5.0 x 10
−
2
Torr (6.6 x 10
−
2
mbar)
Maximum inlet pressure 1.0 atmosphere (0 psig)
Maximum outlet pressure 1.5 atmosphere (7.5 psig)
Inlet connection NW25
Exhaust connection Female 1/4" National Pipe Thread (NW16 adapter provided)
Gas ballast Female 1/8" National Pipe Thread, (20 micron sintered plug provided)
Ambient operating temperature 5 °C to 40 °C (41 °F to 104 °F)
Storage temperature –20 °C to 60 °C (–4 °F to 140 °F)
Motor rating 0.25 HP (0.19 kW)
Operating voltages 1 phase/50-60 Hz/100-115:200-230 VAC
Run current See Table 3 on page 20
Motor thermal protection Automatic thermal protection
Operating speed 60 Hz: 1725 RPM, 50 Hz: 1425 RPM
Cooling system Air-cooled
Weight Pump only: 19.5 kg (43 lbs)
Shipping weight: 20 kg (44 lbs)
Leak rate (with exhaust sealed) <1 x 10
−
7
sccs helium
Noise Level (per ISO 11201) 56 dB(A)
Vibration level at inlet (per ISO 10816-1) Class 1B, 1.5 mm/s
Fuse type M5 x 20 mm, 10 A, Slo-Blo,
Littelfuse Model H215010 or equivalent
Hour meter Integral Hour Meter provided, displays running time to closest .1 hour
Conformance standards Conforms to SEMI S2-2000 and applicable CSA, CUS, and CE standards.
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