Agilent Technologies SH-110 - Interface Drawing with Dimensions; Pumping Speed Curves

SH-110 Dry Scroll Vacuum Pump
16
D R A F T 4 / 1 7 / 1 2
zo
Figure 1 Interface Drawing with Dimensions
Figure 2 Pumping Speed Curves
SH 110 PUMPING SPEED - AIR
TEST PERFORMED IAW ISO 1607-1:1993(E)
0.00
10.00
20.00
30.00
40.00
50.00
60.00
70.00
80.00
90.00
100.00
110.00
120.00
1.E-02 1.E-01 1.E+00 1.E+01 1.E+02 1.E+03
Presure - Torr
Pumpig speed - l/min
50Hz, 115VAC 60Hz, 115VAC