Brooks SLA5850 - Page 6

ii
Brooks
®
Digital MFC's & MFM's
Contents Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Section 4 Maintenance & Troubleshooting
4-1 Maintenance and Troubleshooting .............................................................................................4-1
4-1-1 Troubleshooting Analog or Digital...............................................................................................4-2
4-1-2 System Checks ..........................................................................................................................4-3
4-1-3 Cleaning Procedures..................................................................................................................4-6
4-1-4 Calibration Procedure ................................................................................................................4-6
Section A Essential Instructions ............................................................................................................ A-1
Warranty, Local Sales/Service Contact Information....................................................................... Back Cover
Figures
Figure Page
Number Number
1-1 General Wiring ...........................................................................................................................1-6
1-2 Response Performance of Brooks Digital MFC .........................................................................1-7
1-3 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to 0.5%
Per Second Setpoint Change.....................................................................................................1-7
1-4 SLA5800 Series RS485 15-Pin Analog Connector and Pinouts .................................................1-8
1-5 SLA5800 Series Profibus Connections and Pinouts ..................................................................1-9
1-6 SLA5800 Series DeviceNet Connections and Pinouts ..............................................................1-10
1-7 SLA5800 Series EtherCAT Connections and Pinouts ............................................................... 1-11
1-8 Dimensions - Model SLA5850, Thru-Flow, RS485 ....................................................................1-12
1-9 Dimensions - Model SLA5850, Downport, RS485.....................................................................1-12
1-10 Dimensions - Model SLA5851, Thru-Flow, EtherCAT ...............................................................1-13
1-11 Dimensions - Model SLA5851, Thru-Flow, DeviceNet .............................................................. 1-13
1-12 Dimensions - Model SLA5860, Thru-Flow, Profibus..................................................................1-14
1-13 Dimensions - Model SLA5860, Thru-Flow, RS485 ....................................................................1-14
1-14 Dimensions - Model SLA5861, Thru-Flow, RS485 ....................................................................1-15
1-15 Dimensions - Model SLA5863, Thru-Flow, DeviceNet .............................................................. 1-15
1-16 Dimensions - Model SLA5853, Thru-Flow, Profibus..................................................................1-16
1-17 Dimensions - Model SLA5853, Thru-Flow, EtherCAT ...............................................................1-16
2-1 RS485 D-Connector Shielded Cable Hookup Diagram, Voltage I/O Version ............................. 2-6
2-2 Recommended Wiring Configuration for Current Signals (Non-Isolated Power Supply) ........... 2-7
2-3 Recommended Wiring Configuration for Current Signals (Isolated Power Supply) ...................2-7
2-4 RS485 Multidrop Interconnection TMFs and PC ........................................................................2-8
3-1 Flow Sensor Operational Diagram (VCR
TM
End Connections Shown) .......................................3-2
3-2 Externally Accessible Adjustment (Zero Button) for all Meters/Controllers ................................ 3-3
4-1 Bench Troubleshooting Circuit ................................................................................................... 4-5
Tables
Table Page
Number Number
1-1 SLA5800 Series Specifications ..................................................................................................1-3
1-2 SLA5800 Series Electrical Specifications................................................................................... 1-4
1-3 SLA5800 Series Certifications ...................................................................................................1-5
2-1 Recommended Filter Size..........................................................................................................2-2
4-1 Sensor Troubleshooting .............................................................................................................4-4
4-2 Troubleshooting.......................................................................................................................... 4-7