Brooks SLA5850 - Default Chapter; Table of Contents

i
Brooks
®
Digital MFC's & MFM's
Contents
Installation and Operation Manual
X-TMF-SLA5800-Series-RevB-MFC-eng
Part Number: 541B187AAG
January, 2017
Paragraph Page
Number Number
Section 1 Introduction
1-1 Scope .........................................................................................................................................1-1
1-2 Purpose ......................................................................................................................................1-1
1-3 Description .................................................................................................................................1-1
1-4 Specifications .............................................................................................................................1-2
Section 2 Installation
2-1 General ......................................................................................................................................2-1
2-2 Receipt of Equipment.................................................................................................................2-1
2-3 Recommended Storage Practice ...............................................................................................2-1
2-4 Return Shipment ........................................................................................................................2-1
2-5 Transit Precautions ....................................................................................................................2-2
2-6 Removal from Storage ...............................................................................................................2-2
2-7 Gas Connections........................................................................................................................ 2-2
2-8 In-Line Filter ...............................................................................................................................2-2
2-9 Installation ..................................................................................................................................2-3
2-10 Electrical Interface......................................................................................................................2-5
2-11 Operation Check Procedure (Analog I/O) ..................................................................................2-9
2-12 Operation Check Procedure (Digital I/O)...................................................................................2-10
2-13 Bus/Network (DeviceNet, Profibus, Foundation Fieldbus, EtherCAT) .......................................2-10
Section 3 Operation
3-1 Overview ....................................................................................................................................3-1
3-2 Theory of Operation for Flow Measurement ..............................................................................3-1
3-3 Features .....................................................................................................................................3-3
3-4 Analog I/O Mode of Operation....................................................................................................3-4
3-5 Communications Features .........................................................................................................3-5
3-5-1 RS485 Communications Features (Analog versions only) .........................................................3-5
3-5-2 DeviceNet Communications Features........................................................................................3-6
3-5-3 Profibus Communications Features ...........................................................................................3-6
3-5-4 EtherCAT Communications Features......................................................................................... 3-6
3-6 Alarms (Analog versions only)....................................................................................................3-7
3-6-1 Alarms (Analog versions only) Configuration Attributes .............................................................3-8
3-6-2 Diagnostic Alarms (Analog versions only) ..................................................................................3-9
3-6-3 General Alarms (Analog versions only) ...................................................................................... 3-9
3-7 Calibration/Configuration Sets...................................................................................................3-10
3-8 Special Features .......................................................................................................................3-10
3-8-1 Setpoint Ramping...................................................................................................................... 3-11
3-8-2 Low Setpoint Command Cutoff ................................................................................................. 3-11
3-8-3 Low Flow Output Cutoff.............................................................................................................3-11
3-8-4 Adaptive Control ........................................................................................................................ 3-11
3-8-5 Flow Totalizer ............................................................................................................................ 3-11
3-9 PC-based Support Tools ........................................................................................................... 3-11