Edwards EXT70 Series User Manual

B722-01-880 Issue K
Page 16 © Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Installation
Figure 6 - Typical pumping system
1. Alternative position
for vent-valve
2. Vacuum system
3. High-vacuum gauge
4. Inlet-screen
5. EXT pump
6. Backing valve
7. Vacuum gauge
8. Flexible bellows
9. Foreline trap
10.Rotary backing pump
11.Mist filter
12.Cooling water connectors
13.EXC Controller
14.Air-cooler
15.PRX10 purge restrictor
16.Regulated purge gas supply
17.Vent-valve

Edwards EXT70 Series Specifications

General

Brand	Edwards
Model	EXT70 Series
Category	Water Pump
Language	English