© Edwards Limited 2007. All rights reserved. Page 35
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Service, Spares and Accessories
B722-01-880 Issue K
7.4.8 Vibration isolators
In applications where the small amount of vibration generated by the turbomolecular pump is a problem, a vibration
isolator can be fitted. The isolator consists of two special flanges separated by a flexible bellows and a rubber, anti-
vibration, outer collar. The isolator required is dependent on the pump flange size.
7.4.9 PRX purge restrictor
A modified DN10NW centring-ring is available to filter the purge gas and restrict its flow rate to the recommended
flow of 25 sccm. The restrictor is suitable for all EXT pumps fitted with a purge-port.
7.4.10 VRX vent-restrictor
Use a VRX fixed orifice vent-restrictor to restrict the flow of vent gas into the EXT pump. You can fit a vent-restrictor
to the inlet of a TAV5 vent-valve or PRX10 purge-restrictor. Refer to Section 3.4 for information on the selection of
the correct VRX vent-restrictor.
Product Flange size Item Number
Vibration isolators DN63ISO-K B581-15-000
Vibration isolators DN63CF B581-01-000
Vibration isolators DN100ISO-K B581-20-000
Vibration isolators DNI00CF B581-05-000
Purge restrictor Flange size Item Number
PRX10 NW10 B580-65-001
Vent-restrictor Orifice diameter (mm) Item Number
VRX10 0.1 B580-66-021
VRX20 0.2 B580-66-022
VRX30 0.3 B580-66-023
VRX50 0.5 B580-66-024
VRX70 0.7 B580-66-025
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