Edwards iH1800HTX

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Contents
A590-00-880 Issue D
Contents
Section Page
1 Introduction ....................................................................................... 1
1.1 Scope and definitions ................................................................................................... 1
1.2 Applications ............................................................................................................... 2
1.3 Description ................................................................................................................ 3
1.3.1 The iH HTX system ....................................................................................................... 3
1.3.2 The iH NRV systems ..................................................................................................... 3
1.4 Priority of control ........................................................................................................ 3
2 Technical data .................................................................................... 7
2.1 General technical data .................................................................................................. 7
2.2 Electrical data ............................................................................................................ 9
2.3 Loading ...................................................................................................................10
2.4 Connections ..............................................................................................................11
2.5 General data .............................................................................................................12
3 Installation ....................................................................................... 13
3.1 Locate the dry pumping system ......................................................................................14
3.2 Lubrication ...............................................................................................................15
3.3 Connect the dry pumping system to your vacuum/exhaust system .............................................15
3.4 Connect the iH1800HTX exhaust TMS ................................................................................16
3.5 Connect to your factory extraction system (optional) ............................................................16
3.6 Connect the nitrogen supply ..........................................................................................17
3.6.1 Flammable/pyrophoric materials ....................................................................................17
3.6.2 Gas purges ...............................................................................................................18
3.7 Leak-test the system ...................................................................................................18
3.8 Electrical supply ........................................................................................................18
3.8.1 Reconfigure the iH system for your electrical supply (if necessary) ............................................ 19
3.8.2 Reconfigure the iH system for your electrical supply (iH80/600 only) .........................................19
3.8.3 Connect the electrical supply .........................................................................................21
3.9 Connect an additional RF earth (ground) (optional) .............................................................. 23
3.10 Connect to your emergency stop circuit ............................................................................23
3.11 Connect the cooling-water hoses .....................................................................................24
3.12 Accessories ...............................................................................................................24
3.13 Commission the system ................................................................................................25
3.14 Install additional safety equipment ..................................................................................26
4 Operation ........................................................................................ 27
4.1 Start-up ..................................................................................................................27
4.2 Status indicators ........................................................................................................28
4.3 Manual shut-down ......................................................................................................28
4.4 Automatic shut-down ..................................................................................................29
4.5 Unplanned shutdown and alarms .....................................................................................29
4.6 Emergency stop .........................................................................................................30
4.7 Restart the pump after an emergency stop or automatic shut-down .......................................... 30
4.8 Single equipment monitor (SEM) .....................................................................................30
5 Maintenance ..................................................................................... 31
5.1 Safety and maintenance frequency ..................................................................................31
5.2 Relocate the system for maintenance ...............................................................................32
5.3 Cleaning the pump ......................................................................................................33
5.4 General maintenance ..................................................................................................33
dcs/8119/08/08