Edwards STP-A2503 Series - Installation of the STP Pump to the Vacuum Equipment

STP Series Turbomolecular Pump
MT-00E-001-M
Page 21
INSTALLATION OF THE STP PUMP
2
1.
STP control unit
4.
STP connection cable
7.
Outlet port
2.
Power cable
5.
(Vacuum equipment)
*3
8.
(Vacuum valve)
*3
3.
TMS connection cable
6.
Inlet port flange
9.
(Backing-pump
[dry pump, and other])
*3
*1 The STP pump can be installed through the damper (optional accessory).
*2 The TMS unit is an optional accessory. Refer to the STP Pump Instruction Manual (B) for more detailed information.
*3 The equipment and part within the parentheses must be prepared by the customer.
Figure 14 - Installation of the STP pump to the vacuum equipment
2
3
1
4
5
6
7
8
9
*1
*2